Effects of Edge Roughness on Optical Scattering from Periodic Microstructures
1 online resource (138 pages) : PDF
University of North Carolina at Charlotte
Planar photonic crystals and other microstructured surfaces have important applications in a number of emerging technologies. However, these structures can be difficult to fabricate in a consistent manner. Rapid, precise measurements of critical parameters are needed to control the fabrication process, but current measurement techniques tend to be slow and often require that the sample be modified in order to make the measurement. Optical scattering can provide a rapid, non-destructive, and precise method for measuring these structures, and optical scatterometry is a good candidate technique for measuring micro-structured surfaces for process control. However, variations in the profile, such as those caused by edge roughness, can make significant contributions to the uncertainty in scatterometry measurements. Because of the multi-dimensional nature of the problem, modeling these variations can be computationally expensive. This dissertation examines the effects of edge roughness on optical scatterometry signals. Rigorous numerical simulations show that the effects of edge roughness are sensitive to the correlation length and the frequency content of the roughness as well as its amplitude. However, these rigorous calculations are computationally expensive. A less computationally expensive model based on a generalized Bruggeman effective medium approximation is developed and shown to be effective for modeling the effects of short correlation length edge roughness on optical scatterometry signals.
EFFECTIVE MEDIUM APPROXIMATIONGRATINGSLINE EDGE ROUGHNESSREFLECTANCESCATTEROMETRY
Optical Science and Engineering
Davies, AngelaGbur, GregAstratov, VasilyFiddy, MichaelHocken, Robert
Thesis (Ph.D.)--University of North Carolina at Charlotte, 2009.
This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s). For additional information, see http://rightsstatements.org/page/InC/1.0/.
Copyright is held by the author unless otherwise indicated.