Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity area (flatness), and the optical homogeneity within a transparent cavity; with...
Optical profilometers, such as scanning white light interferometers and confocal microscopes, provide high resolution measurements and are widely utilized in many fields for measuring surface topography. The techniques are capable of high-speed su...
GELAREH BABAIE. Dynamic range enhancement in digital fringe projection and laser interferometry. (Under the direction of DR. FARAMARZ FARAHI)Optical metrology is the science and technology concerning measurements with light. Surface texture and 3D...
Fringe projection technique has been a powerful tool for 3D metrology and surface profilometry with high repeatability. However, for in-situ measurement of objects with highly specular surfaces, large dimensions, and large varying slopes, acquirin...
Deflectometry has been introduced as a viable alternative to interferometric measurement of specular freeform optical surfaces. Deflectometry measurements show high repeatability; however, due to the errors remaining after the calibration and data...
Mid-spatial frequency on freeform optical elements induces small-angle scatter and affects the optical performance. Fabrication techniques involved in making freeform surfaces leave tooling marks on the surface due to the sub-aperture nature of th...
Mid-spatial frequency on freeform optical elements induces small-angle scatter and affects the optical performance. Fabrication techniques involved in making freeform surfaces leave tooling marks on the surface due to the sub-aperture nature of th...
Traditional optical instrumentation typically requires a controlled, stable environment, and this limits systems to a laboratory setting. For in-situ metrology applications and outdoor measurements, novel methods that are compact and stable are re...
In the field of optical metrology, there are many existing techniques for measurement of the surface profile or film thickness of a sample of interest. However, many of these common techniques break down when there exists a high level of noise in ...