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(1 - 4 of 4)
Characterization of Geometric Surface Features Using Statistically Based Analytical Tools
Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology
PERFORMANCE AND SPECIFICATION OF OPTICAL COMPONENTS WITH MID-SPATIAL FREQUENCY SURFACE ERRORS
PRECISION POLISHING DYNAMICS: THE INFLUENCE OF PROCESS VIBRATIONS ON POLISHING RESULTS