The Plasmonic Nanolithography Machine (PLM) is a prototype that adopts near field maskless plasmonic nanolithography to achieve 45 nm line widths at 45 nm half pitch. A plasmonic lens floating on a hydrodynamic air bearing rides on a disc with abo...
The Plasmonic Nanolithography Machine (PLM) is a prototype that adopts near field maskless plasmonic nanolithography to achieve 45 nm line widths at 45 nm half pitch. A plasmonic lens floating on a hydrodynamic air bearing rides on a disc with abo...
The Plasmonic Nanolithography Machine (PLM) is a prototype that adopts near field maskless plasmonic nanolithography to achieve 45 nm line widths at 45 nm half pitch. A plasmonic lens floating on a hydrodynamic air bearing rides on a disc with abo...
